and EUV 's greatest champion.
the EUV light in the first place.
or just EUV .
And to make EUV economically viable, it would have to print hundreds of wafers per hour, 24/7, 365 days a year.
And he saw EUV coming.
a high NA EUV machine, essentially one with a larger optic system that could print smaller features.
like ASML with EUV lithography machines, TSMC with advanced packaging like CoWoS, and SK Hynix with the high bandwidth memory?
It was the first fully functioning EUV prototype.
- ASML had joined the US EUV consortium earlier and now it became their task to find a way to commercialize EUV .
If you look at a EUV light source, what you'll see is that it's kinda like a globe of like purple-ish red light
- Not only are you all in on EUV , you're doubling down even before you know if EUV is gonna work.
It produced 9.8 watts of 13.4 nanometer EUV light, which was then reflected by eight mirrors from the source to the mask to the wafer.
It could print 70 nanometer features and it proved that EUV could work.
So there are basically three ways to generate EUV , to build a sun on Earth.
By that time, EUV was not working and there was this crazy idiot working on the next generation where we could not even make
But improvements in multi patterning with 193 nanometers now meant that EUV would only be useful if the source reached at least 200 watts
Even people who worked on the Engineering Test Stand noted that while EUV technology itself is a done deal, there were six zillion engineering challenges
And so one by one, American companies walked away from developing a full EUV lithography machine.
But just like xenon, neutral tin atoms also absorb EUV light.
The problem was that the tin droplets were too dense, meaning that most of the emitted EUV light was still getting reabsorbed
- Now the problem with the tin issue, you hit the droplet, you generate EUV with a very decent conversion efficiency.
I mean, too little hydrogen and the mirrors would get too dirty, but too much hydrogen would not only absorb too much EUV light,
- But this was, I think, about 2012 or '13, we were struggling to get the EUV power up and Kinoshita visited us.
So we went to the chapel, so Kinoshita just to be safe lit three candles for the three suppliers that were pursuing EUV technology
Are you, are you worried about ASML's EUV
that looked like a very bad bet for many years until about a decade ago when they first were able to build the initial EUV lithography machines.